Elementary microwave plasma sources with extended operating parameters: concept, design and performance. Examples of applications in the very low and low pressure range - IN2P3 - Institut national de physique nucléaire et de physique des particules
Conference Papers Year : 2013

Elementary microwave plasma sources with extended operating parameters: concept, design and performance. Examples of applications in the very low and low pressure range

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Plasma Physics [physics.plasm-ph]

Emmanuelle Vernay  : Connect in order to contact the contributor

https://in2p3.hal.science/in2p3-00849420

Submitted on : Wednesday, July 31, 2013-8:14:55 AM

Last modification on : Thursday, April 11, 2024-1:18:11 PM

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in2p3-00849420 , version 1 (31-07-2013)

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  • HAL Id : in2p3-00849420 , version 1

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P. Baele, T.L. Phan, A. Todoran, C. Prahoveanu, A. Lacoste. Elementary microwave plasma sources with extended operating parameters: concept, design and performance. Examples of applications in the very low and low pressure range. 16th International Conference on Plasma Physics and Applications (CPPA2013), Jun 2013, Bucharest, Romania. ⟨in2p3-00849420⟩

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