Inhomogeneous defect activation by rapid thermal processes in silicon - IN2P3 - Institut national de physique nucléaire et de physique des particules
Journal Articles Applied Physics Letters Year : 1989

Inhomogeneous defect activation by rapid thermal processes in silicon

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in2p3-00019454 , version 1 (30-05-2001)

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  • HAL Id : in2p3-00019454 , version 1

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V. Thong-Quat, W. Eichhammer, P. Siffert. Inhomogeneous defect activation by rapid thermal processes in silicon. Applied Physics Letters, 1989, 54, pp.1235-1237. ⟨in2p3-00019454⟩
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