Some problems arising in hydrogen passivation of silicon by ion bombardment techniques

J.C. Muller; Y. Ababou; A. Barhdadi; A. Mesli; M. Toulemonde; P. Siffert

Conference Papers Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Year : 1985

Some problems arising in hydrogen passivation of silicon by ion bombardment techniques

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1

J.C. Muller

Function : Author

Institut de Recherches Subatomiques

Y. Ababou

Function : Author

Institut de Recherches Subatomiques

A. Barhdadi

Function : Author

Institut de Recherches Subatomiques

A. Mesli

Function : Author

Institut de Recherches Subatomiques

M. Toulemonde

Function : Author
PersonId : 743931
IdHAL : marcel-toulemonde

Institut de Recherches Subatomiques

P. Siffert

Function : Author

Institut de Recherches Subatomiques

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Instrumentation and Detectors [physics.ins-det]

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https://in2p3.hal.science/in2p3-00019431

Submitted on : Tuesday, May 29, 2001-4:45:42 PM

Last modification on : Thursday, April 11, 2024-1:18:11 PM

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in2p3-00019431 , version 1 (29-05-2001)

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HAL Id : in2p3-00019431 , version 1

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J.C. Muller, Y. Ababou, A. Barhdadi, A. Mesli, M. Toulemonde, et al.. Some problems arising in hydrogen passivation of silicon by ion bombardment techniques. Ion Beam Modification Of Materials Conference,Ibmm '84, Jul 1984, Ithaca, United States. pp.304-309. ⟨in2p3-00019431⟩

Some problems arising in hydrogen passivation of silicon by ion bombardment techniques

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