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Conference Papers Annales de Chimie Year : 1984

Nitrogen ions implantation - manufacturing applications

M. Robelet
  • Function : Author
J. Tousset
  • Function : Author
Institut de Physique Nucléaire de Lyon
N. Moncoffre
  • Function : Author
Institut de Physique Nucléaire de Lyon
S. Fayeulle
  • Function : Author
Institut de Physique Nucléaire de Lyon
D. Treheux
  • Function : Author
P. Guiraldenq
  • Function : Author

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https://in2p3.hal.science/in2p3-00004668

Submitted on : Thursday, April 6, 2000-4:08:34 PM

Last modification on : Thursday, April 11, 2024-1:18:11 PM

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in2p3-00004668 , version 1 (06-04-2000)

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  • HAL Id : in2p3-00004668 , version 1

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M. Robelet, J. Tousset, N. Moncoffre, S. Fayeulle, D. Treheux, et al.. Nitrogen ions implantation - manufacturing applications. Colloquium On Metallurgy 26, Jun 1983, Saclay, France. pp.319-322. ⟨in2p3-00004668⟩

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