Microwave plasma with localized power absorption: from elementary sources to device andapplications - IN2P3 - Institut national de physique nucléaire et de physique des particules
Conference Poster Year : 2014

Microwave plasma with localized power absorption: from elementary sources to device andapplications

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in2p3-00943157 , version 1 (07-02-2014)

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  • HAL Id : in2p3-00943157 , version 1

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A. Bès, Long Tan Phan, Stéphane Béchu, J. Pelletier, A. Lacoste. Microwave plasma with localized power absorption: from elementary sources to device andapplications. 8th International Conference on Reactive Plasmas - 31st Symposium on Plasma Processing (ICRP-8/SPP-31), Feb 2014, Fukuoka, Japan. ⟨in2p3-00943157⟩
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