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Conference Papers Year : 2012

The multi beam sputtering: a new thin film deposition approach

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in2p3-00697281 , version 1 (15-05-2012)

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  • HAL Id : in2p3-00697281 , version 1

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P. Sortais, J. Médard. The multi beam sputtering: a new thin film deposition approach. 39th International Conference on Metallurgical Coatings and Thin Films (ICMCTF), Apr 2012, San Diego, United States. ⟨in2p3-00697281⟩
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