Fabrication of large NbSi bolometer arrays for CMB applications
Résumé
Future cosmic microwave background experiments for high-resolution anisotropy mapping and polarisation detection require large arrays of bolometers at low temperature. We have developed a process to build arrays of antenna-coupled bolometers for that purpose. With adjustment of the NbxSi1-x alloy composition, the array can be made of high impedance or superconductive (TES) sensors.