Electrical effects of surface and deep states induced in n-type silicon by rapid thermal processing

W.-O. Adekoya; J.C. Muller; P. Siffert

Journal Articles Applied Physics Letters Year : 1987

Electrical effects of surface and deep states induced in n-type silicon by rapid thermal processing

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W.-O. Adekoya

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J.C. Muller

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Institut de Recherches Subatomiques

P. Siffert

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Institut de Recherches Subatomiques

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https://in2p3.hal.science/in2p3-00019460

Submitted on : Thursday, May 31, 2001-8:00:43 AM

Last modification on : Wednesday, April 24, 2024-11:28:54 AM

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in2p3-00019460 , version 1 (31-05-2001)

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W.-O. Adekoya, J.C. Muller, P. Siffert. Electrical effects of surface and deep states induced in n-type silicon by rapid thermal processing. Applied Physics Letters, 1987, 50, pp.1240-1242. ⟨in2p3-00019460⟩

Electrical effects of surface and deep states induced in n-type silicon by rapid thermal processing

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