Gold gettering induced by rapid thermal doping using spin-on sources

B. Hartiti; J.C. Muller; P. Siffert

Journal Articles Applied Physics Letters Year : 1991

Gold gettering induced by rapid thermal doping using spin-on sources

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B. Hartiti

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J.C. Muller

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Institut de Recherches Subatomiques

P. Siffert

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Institut de Recherches Subatomiques

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in2p3-00015909 , version 1 (31-05-2000)

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B. Hartiti, J.C. Muller, P. Siffert. Gold gettering induced by rapid thermal doping using spin-on sources. Applied Physics Letters, 1991, 59, pp.425-427. ⟨in2p3-00015909⟩

Gold gettering induced by rapid thermal doping using spin-on sources

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