Profiling and nuclear reaction spectroscopy of carbon oxygen and argon contamination in sputter-deposited films using nuclear backscattering - IN2P3 - Institut national de physique nucléaire et de physique des particules
Conference Papers Applied Surface Science Year : 1991

Profiling and nuclear reaction spectroscopy of carbon oxygen and argon contamination in sputter-deposited films using nuclear backscattering

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Nuclear Experiment [nucl-ex]

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https://in2p3.hal.science/in2p3-00013246

Submitted on : Monday, May 31, 1999-3:50:44 PM

Last modification on : Thursday, April 11, 2024-1:18:11 PM

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in2p3-00013246 , version 1 (31-05-1999)

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  • HAL Id : in2p3-00013246 , version 1

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A. Chevarier, N. Chevarier, M. El Bouanani, E. Gerlic, M. Stern, et al.. Profiling and nuclear reaction spectroscopy of carbon oxygen and argon contamination in sputter-deposited films using nuclear backscattering. International Conference On Solid Films And Surfaces 5, Aug 1990, Providence, United States. pp.215-221. ⟨in2p3-00013246⟩

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IN2P3 CNRS UNIV-LYON1 IP2I UDL CMS IPM PHABIO MANOIR THEORIE COSMOLOGIE MATNUC NEUTRINOS_IP2I ONDES_GRAVITATIONNELLES MATICE
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