Journal Articles
Applied Surface Science
Year : 2002
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https://in2p3.hal.science/in2p3-00012840
Submitted on : Thursday, June 5, 2003-3:39:00 PM
Last modification on : Thursday, April 11, 2024-1:18:11 PM
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- HAL Id : in2p3-00012840 , version 1
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H. Spillmann, C. Clerc, M. Dobeli, P.R. Willmott. Gas-phase mechanism in the growth of ZrC$_y$N$_{1-y}$ thin films by pulsed reactive crossed-beam laser ablation. Applied Surface Science, 2002, 197-198, pp.304-311. ⟨in2p3-00012840⟩
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