A high current ion implanter with hybrid scanning

J. Camplan; J. Chaumont; R. Meunier; R. Graber; J.C. Rouge; R. Stocker; L. Wegmann

Journal Articles Nuclear Instruments and Methods in Physics Research Year : 1980

A high current ion implanter with hybrid scanning

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1

J. Camplan

Function : Author

Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse

J. Chaumont

Function : Author

Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse

R. Meunier

Function : Author

Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse

R. Graber

Function : Author

J.C. Rouge

Function : Author

R. Stocker

Function : Author

L. Wegmann

Function : Author

Domains

Instrumentation and Detectors [physics.ins-det]

Jocelyne Lorgeril : Connect in order to contact the contributor

https://in2p3.hal.science/in2p3-00003832

Submitted on : Thursday, January 13, 2000-4:00:23 PM

Last modification on : Monday, September 23, 2024-10:56:17 AM

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in2p3-00003832 , version 1 (13-01-2000)

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HAL Id : in2p3-00003832 , version 1

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J. Camplan, J. Chaumont, R. Meunier, R. Graber, J.C. Rouge, et al.. A high current ion implanter with hybrid scanning. Nuclear Instruments and Methods in Physics Research, 1980, 171, pp.245-250. ⟨in2p3-00003832⟩

A high current ion implanter with hybrid scanning

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