Sputtering Transparent conductive oxide TCO Auger electron spectroscopy AES Indium oxide 17O Annealing AC susceptibility Magnetic semiconductors Acoustic Gallium oxide 13C Topological defects Capillary condensation Nickel 27Alda Silicon Carbide Thin films Topological insulators RBS SiC Atomic Layer Deposition ALD Stable isotopic tracing EPR Diffusion XRD Aluminum Nitridation AFM Nanostructures 15N Adsorption Nuclear reaction analysis Defects HfO2 Periodic multilayer ADSORPTION DESORPTION HYSTERESIS 27Aldp Ageing Growth 27Ald p&α Passivation Photoluminescence Raman spectroscopy Energy loss 3C-SiC 7550Pp NRP Measurement Oxidation 2H Oxygen deficiency Isotopic Tracing GaMnAs Gold 6855Jk Alloy Low energy electron diffraction LEED Kossel diffraction Magnetic anisotropy Density functional theory Interface defects Acoustic propreties of solid 17Op Metal-insulator transition XPS Channeling 8140Ef Pulsed laser deposition Epitaxy Adsorption Isotherms Ferromagnetic resonance Evaluation Alloys Silica 7550Ee Ion implantation Silicon 18O resonance 18O Adsorbed layers Rutherford backscattering spectrometry RBS Pb centers 17Opp Al2O3 Ion beam analysis Hysteresis Magnetization curves Nanoparticles PIXE ALD Aluminium Charge exchange Multilayer Epitaxial growth Zinc oxide 7630Lh X-ray diffraction Silicon carbide Thin film Nuclear resonance profiling NRP